Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437289 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto | 2022-09-06 |
| 11239097 | Etching apparatus and etching method and detecting apparatus of film thickness | Hiroyuki Minemura, Tatehito Usui | 2022-02-01 |