Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251011 | Electron microscope | Takashi Ohshima, Yumiko Anzai, Momoyo Enyama, Yoichi Ose, Toshihide Agemura | 2022-02-15 |
| 11239097 | Etching apparatus and etching method and detecting apparatus of film thickness | Soichiro Eto, Tatehito Usui | 2022-02-01 |