Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538671 | Plasma processing apparatus and data analysis apparatus | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi, Masahiro Sumiya | 2022-12-27 |
| 11410836 | Analysis method and semiconductor etching apparatus | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi | 2022-08-09 |
| 11404253 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Ryoji Asakura, Daisuke Shiraishi, Satomi Inoue | 2022-08-02 |
| 11289313 | Plasma processing apparatus | Shota Umeda, Keita Nogi, Daisuke Shiraishi | 2022-03-29 |