Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424108 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Masahiro Sumiya | 2022-08-23 |
| 11315792 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-04-26 |
| 11257661 | Plasma processing apparatus | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-02-22 |