Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315792 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Masahiro Sumiya, Shigeru Shirayone, Kazuyuki Ikenaga | 2022-04-26 |
| 11257661 | Plasma processing apparatus | Masaki Ishiguro, Masahiro Sumiya, Shigeru Shirayone, Kazuyuki Ikenaga | 2022-02-22 |