Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515167 | Plasma etching method and plasma processing apparatus | Sumiko Fujisaki, Yoshihide Yamaguchi, Hiroyuki Kobayashi, Kohei Kawamura, Yutaka Kouzuma +1 more | 2022-11-29 |
| 11276579 | Substrate processing method and plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Yutaka Kouzuma, Masaru Izawa | 2022-03-15 |
| 11217454 | Plasma processing method and etching apparatus | Hiroto Otake, Hiroyuki Kobayashi, Kohei Kawamura, Masaru Izawa | 2022-01-04 |