Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295960 | Etching method | Takashi Hattori, Masaki Yamada, Michael A. Walker, Catherine King | 2022-04-05 |
| 11217454 | Plasma processing method and etching apparatus | Kazunori Shinoda, Hiroyuki Kobayashi, Kohei Kawamura, Masaru Izawa | 2022-01-04 |