Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515167 | Plasma etching method and plasma processing apparatus | Yoshihide Yamaguchi, Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura, Yutaka Kouzuma +1 more | 2022-11-29 |
| 11380523 | Semiconductor manufacturing apparatus | Yoshihide Yamaguchi | 2022-07-05 |