Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515167 | Plasma etching method and plasma processing apparatus | Sumiko Fujisaki, Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura, Yutaka Kouzuma +1 more | 2022-11-29 |
| 11515169 | Method of making a semiconductor device including etching of a metal silicate using sequential and cyclic application of reactive gases | — | 2022-11-29 |
| 11380523 | Semiconductor manufacturing apparatus | Sumiko Fujisaki | 2022-07-05 |