Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276579 | Substrate processing method and plasma processing apparatus | Hiroyuki Kobayashi, Kazunori Shinoda, Yutaka Kouzuma, Masaru Izawa | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276579 | Substrate processing method and plasma processing apparatus | Hiroyuki Kobayashi, Kazunori Shinoda, Yutaka Kouzuma, Masaru Izawa | 2022-03-15 |