Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462390 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Alex Paterson | 2022-10-04 |
| 11437219 | Frequency tuning for a matchless plasma source | Maolin Long, Yuhou Wang, Alex Paterson | 2022-09-06 |
| 11398387 | Etching isolation features and dense features within a substrate | Juline Shoeb, Alexander Paterson | 2022-07-26 |
| 11342159 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Yuhou Wang, Alex Paterson | 2022-05-24 |