Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462390 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Ying Wu | 2022-10-04 |
| 11437219 | Frequency tuning for a matchless plasma source | Maolin Long, Yuhou Wang, Ying Wu | 2022-09-06 |
| 11424103 | Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment | Yiting Zhang, Saravanapriyan Sriraman | 2022-08-23 |
| 11342159 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Yuhou Wang, Ying Wu | 2022-05-24 |
| 11224116 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Ricky Marsh | 2022-01-11 |