Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538666 | Multi-zone cooling of plasma heated window | Yiting Zhang, Richard A. Marsh, Alexander Paterson | 2022-12-27 |
| 11495441 | Systems for cooling RF heated chamber components | Jon McChesney, Richard A. Marsh, Alexander Paterson, John Holland | 2022-11-08 |
| 11424103 | Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment | Yiting Zhang, Alex Paterson | 2022-08-23 |