Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495441 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson | 2022-11-08 |
| 11335539 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2022-05-17 |