Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538666 | Multi-zone cooling of plasma heated window | Yiting Zhang, Richard A. Marsh, Saravanapriyan Sriraman | 2022-12-27 |
| 11495441 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, John Holland | 2022-11-08 |
| 11398387 | Etching isolation features and dense features within a substrate | Juline Shoeb, Ying Wu | 2022-07-26 |