Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462390 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2022-10-04 |
| 11398387 | Etching isolation features and dense features within a substrate | Alexander Paterson, Ying Wu | 2022-07-26 |