Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437219 | Frequency tuning for a matchless plasma source | Maolin Long, Ying Wu, Alex Paterson | 2022-09-06 |
| 11342159 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Ying Wu, Alex Paterson | 2022-05-24 |
| 11224116 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2022-01-11 |