Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499869 | Optical wall and process sensor with plasma facing sensor | Chuang-Chia Lin | 2022-11-15 |
| 11486927 | Bode fingerprinting for characterizations and failure detections in processing chamber | Tao Zhang, Ajit Balakrishna | 2022-11-01 |
| 11346875 | Micro resonator array sensor for detecting wafer processing parameters | Chuang-Chia Lin | 2022-05-31 |
| 11289387 | Methods and apparatus for backside via reveal processing | Prayudi Lianto, Sik Hin Chi, SHIH-CHAO HUNG, Pin Gian Gan, Ricardo Fujii Vinluan +10 more | 2022-03-29 |
| 11284018 | Smart camera substrate | Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2022-03-22 |