Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499869 | Optical wall and process sensor with plasma facing sensor | Upendra Ummethala | 2022-11-15 |
| 11346875 | Micro resonator array sensor for detecting wafer processing parameters | Upendra Ummethala | 2022-05-31 |
| 11268807 | Hoist and winch cable angle sensor | — | 2022-03-08 |