Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462416 | Plasma processing method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Hiroyuki Kobayashi | 2022-10-04 |
| 11437289 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Soichiro Eto, Tsubasa Okamoto, Shigeru Nakamoto | 2022-09-06 |
| 11424110 | Plasma processing apparatus and operational method thereof | Masahito Togami, Kosa Hirota, Satomi Inoue, Shigeru Nakamoto | 2022-08-23 |
| 11287782 | Computer, method for determining processing control parameter, substitute sample, measurement system, and measurement method | Takeshi Ohmori, Hyakka Nakada, Masaru Kurihara, Naoyuki Kofuji | 2022-03-29 |
| 11239097 | Etching apparatus and etching method and detecting apparatus of film thickness | Soichiro Eto, Hiroyuki Minemura | 2022-02-01 |