Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398371 | Plasma processing apparatus | Kenetsu Yokogawa, Taku Iwase | 2022-07-26 |
| 11287782 | Computer, method for determining processing control parameter, substitute sample, measurement system, and measurement method | Takeshi Ohmori, Hyakka Nakada, Masaru Kurihara, Tatehito Usui | 2022-03-29 |