Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49066 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelis Gerardus Van Der Sanden, Geoffrey O'Connor +1 more | 2022-05-10 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | Mehmet Ali AKBAS, David Hart PETERSON, Michael Perry, Richard B. Lewis, Iliya Sigal | 2022-03-08 |