Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49066 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Geoffrey O'Connor, Michael Andrew Chieda +1 more | 2022-05-10 |
| 11287752 | Cooling apparatus and plasma-cleaning station for cooling apparatus | Adrianus Hendrik Koevoets, Cornelis Adrianus De Meijere, Willem Michiel De Rapper, Sjoerd Nicolaas Lambertus Donders, Jan Groenewold +4 more | 2022-03-29 |