Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454895 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2022-09-27 |
| 11376663 | Substrate holder and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2022-07-05 |
| RE49066 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelis Gerardus Van Der Sanden, Geoffrey O'Connor, Michael Andrew Chieda +1 more | 2022-05-10 |
| 11235388 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2022-02-01 |