Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422289 | Anti-reflection coating | Parag Vinayak Kelkar | 2022-08-23 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | Mehmet Ali AKBAS, Tammo Uitterdijk, Michael Perry, Richard B. Lewis, Iliya Sigal | 2022-03-08 |