Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448976 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Dennis Van Den Berg, Wouter VANESCH +1 more | 2022-09-20 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | David Hart PETERSON, Tammo Uitterdijk, Michael Perry, Richard B. Lewis, Iliya Sigal | 2022-03-08 |