Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448976 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more | 2022-09-20 |
| 11385547 | Extraction body for lithographic apparatus | Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more | 2022-07-12 |