Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385547 | Extraction body for lithographic apparatus | Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more | 2022-07-12 |
| 11243476 | Stage apparatus, lithographic apparatus, control unit and method | Ringo Petrus Cornelis VAN DORST, Benjamin Cunnegonda Henricus Smeets, Mark Johannes Hermanus Frencken | 2022-02-08 |