Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454892 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2022-09-27 |
| 11243476 | Stage apparatus, lithographic apparatus, control unit and method | Ringo Petrus Cornelis VAN DORST, Gijs Kramer, Benjamin Cunnegonda Henricus Smeets | 2022-02-08 |