Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243476 | Stage apparatus, lithographic apparatus, control unit and method | Gijs Kramer, Benjamin Cunnegonda Henricus Smeets, Mark Johannes Hermanus Frencken | 2022-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243476 | Stage apparatus, lithographic apparatus, control unit and method | Gijs Kramer, Benjamin Cunnegonda Henricus Smeets, Mark Johannes Hermanus Frencken | 2022-02-08 |