Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448976 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Wouter VANESCH +1 more | 2022-09-20 |