Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414740 | Processing system for forming layers | Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Andrew J. Constant +4 more | 2022-08-16 |
| D960216 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2022-08-09 |
| 11348823 | Compliant robot blade for substrate support and transfer | Jeffrey A. Brodine, Glen T. Mori | 2022-05-31 |
| D947914 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa | 2022-04-05 |
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, David T. Or | 2022-02-01 |