Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488854 | Substrate handling device with adjustable joints | Kihyun Kim, Rutvij Naik | 2022-11-01 |
| D965524 | Susceptor support | Aniket PATIL, John DiSanto, Saket Rathi | 2022-10-04 |
| D965044 | Susceptor shaft | Aniket PATIL, John DiSanto, Saket Rathi | 2022-09-27 |
| D958764 | Higher temperature vented susceptor | Uday Kiran Rokkam, Saket Rathi, Dakai Bian | 2022-07-26 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen | 2022-04-05 |
| D947913 | Susceptor shaft | Aniket PATIL | 2022-04-05 |