Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-09-20 |
| 11373891 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same | Paul B. Reuter, Robin C. Armstrong, John C. Menk | 2022-06-28 |
| 11294164 | Integrated system and method | Igor Krivts (Krayvitz), Yoram Uziel, Albert Mariasin, Rami Elichai, Zvi Goren | 2022-04-05 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-03-22 |
| 11244844 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Paul B. Reuter, Murali Narasimhan, Amulya L. Athayde, Patrick D. Pannese, Dean C. Hruzek | 2022-02-08 |
| 11244846 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Michael R. Rice, Karuppasamy Muthukamatchi | 2022-02-08 |