Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more | 2022-12-06 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2022-09-20 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2022-03-22 |