Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, Helder Lee, Sangram Patil +3 more | 2022-09-20 |
| 11373891 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same | Paul B. Reuter, Robin C. Armstrong, Nir Merry | 2022-06-28 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, Helder Lee, Sangram Patil +3 more | 2022-03-22 |