Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512391 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2022-11-29 |
| 11508611 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Kalyanjit Ghosh, Sanjeev Baluja, Praket P. Jha, Krishna Nittala | 2022-11-22 |