Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2022-07-19 |
| 11244811 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2022-02-08 |