Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11501945 | Side inject designs for improved radical concentrations | Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2022-11-15 |
| 11501954 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2022-11-01 |
| 11220746 | Half-angle nozzle | — | 2022-01-11 |