Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501969 | Direct extreme ultraviolet lithography on hard mask with reverse tone | Yann Mignot, Yongan Xu, Ekmini Anuja De Silva, Ashim Dutta | 2022-11-15 |
| 11329001 | Embedded chip identification formed by directed self-assembly | Kangguo Cheng | 2022-05-10 |
| 11239077 | Litho-etch-litho-etch with self-aligned blocks | Nelson Felix, Yann Mignot, Ekmini Anuja De Silva, John C. Arnold, Allen H. Gabor | 2022-02-01 |
| 11226561 | Self-priming resist for generic inorganic hardmasks | Indira Seshadri, Kristin Schmidt, Nelson Felix, Daniel P. Sanders, Jing Guo +2 more | 2022-01-18 |