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Forming self-aligned vias and air-gaps in semiconductor fabrication |
Lawrence A. Clevenger, John H. Zhang |
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Statistical design with importance sampling reuse |
Rajiv V. Joshi, Rouwaida N. Kanj, Sani R. Nassif |
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Self-aligned via interconnect structures |
Benjamin C. Backes, Brian Alexander Cohen, Joyeeta Nag |
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Replacement gate cross-couple for static random-access memory scaling |
Ruilong Xie, Kangguo Cheng, Veeraraghavan S. Basker, Juntao Li |
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Self-aligned top via scheme |
Ruilong Xie, Chih-Chao Yang, Juntao Li, Kangguo Cheng |
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Nanosheet transistor with asymmetric gate stack |
Ruilong Xie, Kangguo Cheng, Juntao Li, Dechao Guo, Tao Li +1 more |
2022-02-15 |