Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442357 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Masahiro Hashimoto | 2022-09-13 |
| 11435662 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Takashi Uchida | 2022-09-06 |
| 11314161 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Kazutake TANIGUCHI | 2022-04-26 |
| 11314162 | Mask blank, transfer mask, and method of manufacturing semiconductor device | Kazutake TANIGUCHI | 2022-04-26 |
| 11281089 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2022-03-22 |
| 11231645 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2022-01-25 |
| 11226549 | Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device | Osamu Nozawa | 2022-01-18 |