Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314161 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido | 2022-04-26 |
| 11314162 | Mask blank, transfer mask, and method of manufacturing semiconductor device | Hiroaki Shishido | 2022-04-26 |