Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442357 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Hiroaki Shishido | 2022-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442357 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Hiroaki Shishido | 2022-09-13 |