Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333966 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Yasutaka HORIGOME, Hitoshi Maeda | 2022-05-17 |
| 11281089 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2022-03-22 |
| 11231645 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2022-01-25 |
| 11226549 | Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device | Hiroaki Shishido | 2022-01-18 |