Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435662 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takashi Uchida | 2022-09-06 |
| 11415875 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hitoshi Maeda, Yasutaka HORIGOME | 2022-08-16 |
| 11281089 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2022-03-22 |