Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415875 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hitoshi Maeda, Ryo Ohkubo | 2022-08-16 |
| 11333966 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Hitoshi Maeda | 2022-05-17 |