Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262660 | Image sensor, position sensor device, lithography system, and method for operating an image sensor | Jan Horn, Andy Zott, Markus Deguenther | 2022-03-01 |
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Christof Riedesel, Erik Essers | 2022-02-01 |