Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11504855 | System, method and marker for the determination of the position of a movable object in space | Nils Haverkamp, Marc Schneider, Tanja Teuber, Lars Omlor | 2022-11-22 |
| 11402760 | Optical arrangement and lithography apparatus | Stefan Richter | 2022-08-02 |
| 11262660 | Image sensor, position sensor device, lithography system, and method for operating an image sensor | Ulrich Bihr, Andy Zott, Markus Deguenther | 2022-03-01 |
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Ulrich Bihr, Christof Riedesel, Erik Essers | 2022-02-01 |