Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Ulrich Bihr, Erik Essers | 2022-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Ulrich Bihr, Erik Essers | 2022-02-01 |